TY  - BOOK
AU  - Hitchon,W. N.G.
TI  - PLASMA PROCESSES FOR SEMICONDUCTOR FABRICATION
SN  - 0521591759
U1  - 621.38152 
PY  - 1999///
CY  - 
PB  - Cambridge Univ. Press, Cambridge
KW  - Semiconductors -- Ething
KW  - Plasma Ething
N1  - Includes Bibliographical References And Index
ER  -