TY  - BOOK
AU  - Ehmann,Kornel F.
TI  - MICROMANUFACTURING: INTERNATIONAL RESEARCH AND DEVELOPMENT
SN  - 9781402059483
U1  - 671.35 
PY  - 2007///
CY  - 
PB  - Springer, Aa Dordrecht
KW  - Microfabrication
KW  - Micromachining
ER  -