TY  - BOOK
AU  - S. A. Campbell,H. J. Lewerenz
AU  - Lewerenz,H. J.
TI  - SEMICONDUCTOR MICROMACHINING
SN  - 0471966827
U1  - 621.38152 
PY  - 1998///
CY  - 
PB  - John Wiley, Chichester
KW  - Semiconductors
N1  - Includes Bibliographical References And Index
ER  -