621.38152  / P871P <br/>
Powell,Ronald A <br/>
       PVD FOR MICROELECTRONICS 
 / SPUTTER DEPOSITION APPLIED TO SEMICONDUCTOR MANUFACTURING 
 .-  Academic Press, San Diego,  c1999 
 .- xiii,419 . 
.- ( Thin Films     
<br><u>ISBN:</u> 012533026X 
<br/><u>Subject Headings:</u> <br/>Thin Film Devices -- Design And Construction;<br/>Vapor-Plating;<br/>Thin Films;
<br/><U>Author Added Entry: </u><br/>Rossnagel,Stephen M;
<br><U>Copy Details:</u><br> Acc. No.: <b>A131810</b>, Full Call No.: 621.38152 P871P,   Item type:  Books , Location: General Stacks, <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>