TY  - BOOK
AU  - Powell,Ronald A
AU  - Rossnagel,Stephen M
TI  - PVD FOR MICROELECTRONICS
SN  - 012533026X
U1  - 621.38152 
PY  - 1999///
CY  - 
PB  - Academic Press, San Diego
KW  - Thin Film Devices -- Design And Construction
KW  - Vapor-Plating
KW  - Thin Films
ER  -