TY  - BOOK
AU  - Graff,Klaus
TI  - METAL IMPURITIES IN SILICON-DEVICE FABRICATION
SN  - 3540642137
U1  - 621.38152 
PY  - 2000///
CY  - 
PB  - Springer-Verlag, Berlin
KW  - Semiconductors -- Defects
KW  - Silicon -- Defects
KW  - Silicon -- Inclusions
ER  -