TY  - BOOK
AU  - R. J. Shul,S. J. Pearton
AU  - Pearton,S. J.
TI  - HANDBOOK OF ADVANCED PLASMA PROCESSING TECHNIQUES
SN  - 3540667725
U1  - 621.044 
PY  - 2000///
CY  - 
PB  - Springer-Verlag, Berlin
KW  - Plasma Engineering
KW  - Electronic Circuits -- Design And Construction
KW  - Plasma Etching
ER  -