TY  - BOOK
AU  - El-Kareh,Badih
TI  - FUNDAMENTALS OF SEMICONDUCTOR PROCESSING TECNOLOGY
SN  - 0792395344
U1  - 621.38152 
PY  - 1995///
CY  - 
PB  - Kluwer Academic Publishers, Boston
KW  - Semiconductors -- Design And Construction
KW  - Manufacturing Process
ER  -