TY  - BOOK
AU  - Gad-El-Hak,Mohamed
AU  - Mahajan,Roop
TI  - THE MEMS HANDBOOK
SN  - 0849391377
U1  - 621.381 
PY  - 2006///
CY  - 
PB  - Crc Press, Boca Raton
KW  - Microelectromechanical Systems
N1  - Contents : V.1.Mems : Introduction And Fundamentals - V.2. Mems : Design And Fabrication - V.3. Mems : Applications
ER  -