TY  - BOOK
AU  - Andre No Anders
AU  - Anders,Andre
TI  - HANDBOOK OF PLASMA IMMERSION ION IMPLANTATION AND DEPOSITION
SN  - 0471246980
U1  - 671.7 
PY  - 2000///
CY  - 
PB  - John Wiley, New York
KW  - Ion Implantation
KW  - Ion Bombardment -- Industrial Applications
KW  - Plasma (Ionized Gases)
ER  -