TY  - BOOK
AU  - Elwenspoek, M.
AU  - Wiegerink, R.
TI  - MECHANICAL MICROSENSORS
SN  - 3540675825
U1  - 681.2 
PY  - 2001///
CY  - Berlin
PB  - Springer-Verlag, 
KW  - Detectors -- Design And Constructions
KW  - Microelectromechanical Systems -- Design And Construction
KW  - Tranducers
ER  -