TY  - BOOK
AU  - Yoshio No Nishi,Robert No Doering,Tim No Wooldrige
AU  - Wooldrige,Tim
TI  - HANDBOOK OF SEMICONDUCTOR MANUFACTURING TECHNOLOGY
SN  - 0824787838
U1  - 621.38152 
PY  - 2000///
CY  - 
PB  - Marcel Dekker,New York
KW  - Semiconductors -- Design And Construction -- Handbooks, Manuals Etc
KW  - Semiconductor Industry -- Handbooks, Manuals Etc
N1  - Includes Bibliographical References And Index
ER  -