TY  - BOOK
AU  - Nalwa, Hari Singh [ed.]
TI  - Handbook of thin film materials [5 volume set]
SN  - 0125129084
U1  - 621.38152 
PY  - 2002///
CY  - San Diego
PB  - Academic Press
KW  - Thin film devices -- Handbooks, Manuals, etc
KW  - Semiconductors -- Materials -- Handbooks, Manuals, etc
KW  - Electronic apparatus and appliances -- Handbooks, Manuals, etc
N1  - Contents : v. 1. Deposition and processing of thin films -- v. 2. Characterization and spectroscopy of thin films -- v. 3. 	Ferroelectric and dielectric thin films -- v. 4. Semiconductor and superconductor thin films -- v. 5. Nanomaterials and magnetic thin films
ER  -