TY  - BOOK
AU  - Bechtold,T.,Rudnyi,E. B.
AU  - Korvink,J. G.
TI  - FAST SIMULATION OF ELECTRO-THERMAL MEMS
SN  - 3540346120
U1  - 621.381 
PY  - 2007///
CY  - 
PB  - Springer-Verlag, Berlin
KW  - Microelectromechanical Systems -- Mathematical Models
ER  -