TY  - BOOK
AU  - Misra,Ashutosh,Hogan,Jeremiah D.
AU  - Chorush,Russell
TI  - HANDBOOK OF CHEMICALS AND GASES FOR THE SEMICONDUCTOR INDUSTRY
SN  - 0471316717
U1  - 660.02 
PY  - 2002///
CY  - 
PB  - John Wiley, New York
KW  - Chemicals -- Handbook, Manuals, Etc
KW  - Semiconductors -- Materials -- Handbooks, Manuals, Etc
N1  - Includes Index
ER  -