621.381  / M418 <br/>
F E H Tay,No <br/>
       MATERIALS & PROCESS INTEGRATION FOR MEMS 
 / 
 .-  Kluwer Academic Publishers, Boston,  c2002 
 .- xix,299 . 
.- ( Microsystems  V.9   
<br><u>ISBN:</u> 1402071752 
<br/><u>Subject Headings:</u> <br/>Microelectromechanical Systems;
<br/><U>Author Added Entry: </u><br/>Tay,F E H;
<br><U>Copy Details:</u><br> Acc. No.: <b>A142644</b>, Full Call No.: 621.381 M418,   Item type:  Books , Location: COMPACT STORAGE (BASEMENT), <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>