TY  - BOOK
AU  - F E H Tay,No
AU  - Tay,F E H
TI  - MATERIALS & PROCESS INTEGRATION FOR MEMS
SN  - 1402071752
U1  - 621.381 
PY  - 2002///
CY  - 
PB  - Kluwer Academic Publishers, Boston
KW  - Microelectromechanical Systems
ER  -