TY  - BOOK
AU  - Richards,B. P.,Footner,P. K.
TI  - THE ROLE OF MICROSCOPY IN SEMICONDUCTOR FAILURE ANALYSIS
SN  - 0 19 856432 5
U1  - 621.38152 
PY  - 1992///
CY  - 
PB  - Oxford Univ. Pr.,Oxford
KW  - Semiconductors -- Testing
KW  - Microscope And Microscopy
ER  -