TY  - BOOK
AU  - Senturia, Stephen D.
TI  - Microsystem design
SN  - 0792372468
U1  - 621.381 
PY  - 2001///
CY  - Boston
PB  - Kluwer Academic Publishers
KW  - Microelectromechanical Systems--Design And Construction
KW  - System Design
ER  -