TY  - BOOK
AU  - Dobkin,Daniel M.
AU  - Zuraw,Michael K.
TI  - Priciples of chemical vapor deposion
SN  - 1402012489
U1  - 671.735 
PY  - 2003///
CY  -  Boston
PB  - Kluwer Academic Publishers
KW  - Vapor-Plating
KW  - Refractory Coating
N1  - Includes Bibliographical References And Index
ER  -