TY  - BOOK
AU  - T Makabe,No
AU  - Makabe,T
TI  - ADVANCES IN LOW TEMPERATURE RF PLASMAS
SN  - 0444510958
U1  - 530.044 
PY  - 2002///
CY  - 
PB  - Elsevier, Amsterdam
KW  - Low Temperature Plasmas -- Industrial Applications
ER  -