TY  - BOOK
AU  - Plummer, James D.
AU  - Deal, Michael D.
AU  - Peter B. Griffin
TI  - Silicon VLSI technology: fundamentals, practice and modeling
SN  - 0130850373
U1  - 621.395 
PY  - 2000///
CY  - New Jersey
PB  - Prentice Hall
KW  - Integrated circuits
ER  -