TY  - BOOK
AU  - Metev,Simeon M.
AU  - Veiko,Vadim P.
TI  - LASER ASSISTED MICROTECHNOLOGY
SN  - 354063973X
U1  - 621.38152028 
PY  - 1998///
CY  - 
PB  - Springer-Verlag, Berlin
KW  - Electronic Industries -- Technological Innovations
KW  - Lasers -- Industrial Applications
KW  - Manufacturing Processes
N1  - Includes Bibliographical References And Index
ER  -