TY  - BOOK
AU  - Maluf, Nadim
TI  - INTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS ENGINEERING
SN  - 0890065810
U1  - 621.381 
PY  - 2000///
CY  - Boston
PB  - Artech House 
KW  - Microelectromechanical Systems
ER  -