TY  - BOOK
AU  - Rebeiz,Gabriel M.
TI  - RF MEMS
SN  - 0471201693
U1  - 621.381 
PY  - 2003///
CY  - 
PB  - John Wiley & Sons Inc., New Jersey
KW  - Microelectromechanical Systems
KW  - Very High Speed Integrated Circuits
ER  -