TY  - BOOK
AU  - Lyshevski,Sergey Edward
TI  - MEMS AND NEMS
SN  - 0849312620
U1  - 621.381 
PY  - 2002///
CY  - 
PB  - Crc Press, Boca Raton
KW  - Microelectromechanical Systems
ER  -