621.381  / M72N <br/>
Nassar,Raja <br/>
       MODELLING OF MICROFABRICATION SYSTEMS 
 / 
 .-  Springer-Verlag, Berlin,  2003 
 .- x,269 . 
<br><u>ISBN:</u> 3540002529 
<br/><u>Subject Headings:</u> <br/>Microelectronics -- Mathematical Models;<br/>Integrated Circuits -- Mathematical Models;
<br/><U>Author Added Entry: </u><br/>Dai,Weizhong;
<br><U>Copy Details:</u><br> Acc. No.: <b>A145684</b>, Full Call No.: 621.381 M72N,   Item type:  Books , Location: General Stacks, <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>