TY  - BOOK
AU  - Nassar,Raja
AU  - Dai,Weizhong
TI  - MODELLING OF MICROFABRICATION SYSTEMS
SN  - 3540002529
U1  - 621.381 
PY  - 2003///
CY  - 
PB  - Springer-Verlag, Berlin
KW  - Microelectronics -- Mathematical Models
KW  - Integrated Circuits -- Mathematical Models
ER  -