TY  - BOOK
AU  - Jumana Boussey,No
AU  - Boussey,Jumana
TI  - MICROSYSTEMS TECHNOLOGY
SN  - 1903996473
U1  - 621.381 
PY  - 2002///
CY  - 
PB  - Kogan Page, London
KW  - Microelectromechanical Systems
ER  -