TY  - BOOK
AU  - Ananthasuresh,G. K.
TI  - OPTIMAL SYNTHESIS METHODS FOR MEMS
SN  - 1402076207
U1  - 621.381 
PY  - 2003///
CY  - 
PB  - Kluwer Academic Publishers, Boston
KW  - Microelectromechanical System -- Computer Simulation
ER  -