TY  - BOOK
AU  - Kaltenbacher,Manfred
TI  - NUMERICAL SIMULATION OF MECHATRONIC SENSOR AND ACTUATORS
SN  - 354020458
U1  - 621.3 
PY  - 2004///
CY  - 
PB  - Springer-Verlag, Berlin
KW  - Microelectromechanical Systems
KW  - Mechatronics
ER  -