TY  - BOOK
AU  - Mohamed Gad-El-Hak,No
AU  - Kreith,Frank
TI  - THE MEMS HANDBOOK
SN  - 0849300770
U1  - 621 
PY  - 2001///
CY  - 
PB  - Crc Press,Boca Raton
KW  - Mechanical Engineering -- Handbook, Manuals, Etc
ER  -