TY  - BOOK
AU  - Wasa,Kiyotaka,Kitabatake,Makoto
AU  - Adachi,Hideaki
TI  - THIN FLIM MATERIALS TECHNOLOGY
SN  - 0815514832
U1  - 621.38152 
PY  - 2004///
CY  - 
PB  - William Andrew Pub., Norwich, Ny
KW  - Cathode Sputtering (Planing Process)
KW  - Thin Films
ER  -