TY  - BOOK
AU  - Brand,O.
AU  - Fedder,G. K.
TI  - CMOS-MEMS
SN  - 3527310800
U1  - 621.3815 
PY  - 2005///
CY  - 
PB  - Wiley-Vch, Weinheim
KW  - Metal Oxide Semiconductors, Complementary
KW  - Microelectromechanical Systems
ER  -