TY  - BOOK
AU  - Vasyl Michael Harik,Li-Shi Luo
AU  - Luo,Li-Shi
TI  - MICROMECHANICS AND NANOSCALE EFFECTS
SN  - 1402019688
U1  - 621.381 
PY  - 2004///
CY  - 
PB  - Kluwer Academic Publishers, 3300 Ah Dordrecht
KW  - Microelectromechanical Systems
KW  - Actuators
KW  - Microelectronics
ER  -