TY  - BOOK
AU  - S P Murarka,M Eizenberg,A K Sinha
AU  - Sinha,A K
TI  - INTERLAYER DIELECTRICS FOR SEMICONDUCTOR TECHNOLOGIES
SN  - 0125112211
U1  - 620.195 
PY  - 2003///
CY  - 
PB  - Elsevier, Amsterdam
KW  - Dielectrics
KW  - Electric Insulators And Insulation
ER  -