TY  - BOOK
AU  - Franssila, Sami
TI  - Introduction to microfabrication
SN  - 0470851066
U1  - 621.3 
PY  - 2004///
CY  - Chichester
PB  - John Wiley & Sons
KW  - Microelectromechanical systems
KW  - Electronic apparatus and appliances
KW  - Microfabrication
ER  -