TY  - BOOK
AU  - H. Baltes,No
AU  - Baltes,H.
TI  - ENABLING TECHNOLOGY FOR MEMS AND NANODEVICES
SN  - 352730746X
U1  - 620.5 
PY  - 2004///
CY  - 
PB  - Wiley-Vch, Weinheim
KW  - Nanotechnology
ER  -