TY  - BOOK
AU  - Basting,D.
AU  - Marowsky,G.
TI  - EXCIMER LASER TECHNOLOGY
SN  - 3540200568
U1  - 621.3663 
PY  - 2005///
CY  - 
PB  - Springer-Verlag, Berlin
KW  - Excimer Lasers
ER  -