MEMS/MOEMS COMPONENTS AND THEIR APPLICATIONS - Janson,Siegfried W; Henning,Albert K (Spie-The International Soc. For Optical Engg., Washington, 2004)
Sponsored By Spie-The International Society For Optical Engineering
Includes Index
Keywords: Microelectromechanical Systems--Congresses; Optoelectronic Devices--Congresses