TY  - BOOK
AU  - Janson,Siegfried W
AU  - Henning,Albert K
TI  - MEMS/MOEMS COMPONENTS AND THEIR APPLICATIONS
SN  - 0819452521
U1  - 621.381 
PY  - 2004///
CY  - 
PB  - Spie-The International Soc. For Optical Engg., Washington
KW  - Microelectromechanical Systems--Congresses
KW  - Optoelectronic Devices--Congresses
N1  - Sponsored By Spie-The International Society For Optical Engineering; Includes Index
ER  -