530.44  / L621P2 <br/>
Lieberman,Michael A.,Lichtenberg,Allan J. <br/>
       PRINCIPLES OF PLASMA DISCHARGES AND MATERIALS PROCESSING 
 / 
 .- 2nd 
 .-  John Wiley & Sons Inc., New Jersey,  2005 
 .- xxxv,757 . 
<br><u>ISBN:</u> 0471720011 
<br/><u>Subject Headings:</u> <br/>Plasma Dynamics;<br/>Thin Films -- Surfaces;<br/>Plasma Etching;
<br><U>Copy Details:</u><br> Acc. No.: <b>A151641</b>, Full Call No.: 530.44 L621P2,   Item type:  Books , Location: General Stacks, <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>