530.44 / L621P2
Lieberman,Michael A.,Lichtenberg,Allan J.
PRINCIPLES OF PLASMA DISCHARGES AND MATERIALS PROCESSING
/
.- 2nd
.- John Wiley & Sons Inc., New Jersey, 2005
.- xxxv,757 .
ISBN: 0471720011
Subject Headings:
Plasma Dynamics;
Thin Films -- Surfaces;
Plasma Etching;
Copy Details:
Acc. No.: A151641, Full Call No.: 530.44 L621P2, Item type: Books , Location: General Stacks,
------------------------- --------------------- ------ --------- ------- ------- --------- --------