TY  - BOOK
AU  - Lieberman,Michael A.,Lichtenberg,Allan J.
TI  - PRINCIPLES OF PLASMA DISCHARGES AND MATERIALS PROCESSING
SN  - 0471720011
U1  - 530.44 
PY  - 2005///
CY  - 
PB  - John Wiley & Sons Inc., New Jersey
KW  - Plasma Dynamics
KW  - Thin Films -- Surfaces
KW  - Plasma Etching
ER  -