TY - BOOK AU - Lieberman,Michael A.,Lichtenberg,Allan J. TI - PRINCIPLES OF PLASMA DISCHARGES AND MATERIALS PROCESSING SN - 0471720011 U1 - 530.44 PY - 2005/// CY - PB - John Wiley & Sons Inc., New Jersey KW - Plasma Dynamics KW - Thin Films -- Surfaces KW - Plasma Etching ER -