TY  - BOOK
AU  - Diebold,Alain C
TI  - HANDBOOK OF SILICON SEMICONDUCTOR METROLOGY
SN  - 0824705068
U1  - 621.38152 
PY  - 2001///
CY  - 
PB  - Marcel Dekker, New York
KW  - Semiconductors -- Measurement
KW  - Semiconductors -- Inspection
ER  -