TY  - BOOK
AU  - Runyan,W R
AU  - Bean,K E
TI  - SEMICONDUCTOR INTEGRATED CIRCUIT PROCESSING TECHNOLOGY
SN  - 0201108313
U1  - 621.38173 
PY  - 1990///
CY  - 
PB  - Addison--Wesley Publishing Company, California
KW  - Integrated Circuits--Design And Construction
KW  - Semiconductors--Design And Construction
N1  - Includes Index
ER  -