TY  - BOOK
AU  - Motamedi,Manouchehr E.
TI  - MOEMS
SN  - 0819450219
U1  - 621.381 
PY  - 2005///
CY  - 
PB  - Spie-The International Soc. For Optical Engg., Washington
KW  - Microelectromechanical Systems
KW  - Optoelectronic Devices
KW  - Microfabrication
ER  -