TY  - BOOK
AU  - Orloff,Jon,Utlaut,Mark
AU  - Swanson,Lynwood
TI  - HIGH RESOLUTION FOCUSED ION BEAMS
SN  - 030647350X
U1  - 621.38152 
PY  - 2003///
CY  - 
PB  - Kluwer Academic / Plenum Publishers, New York
KW  - Ion Bombardment -- Industrial Applications
ER  -