TY  - BOOK
AU  - Gardner,Julian W.,Varadan,Vijay K.
AU  - Awadelkarim,Osama O.
TI  - MICROSENSORS, MEMS AND SMART DEVICES
SN  - 047186109X
U1  - 621.381 
PY  - 2001///
CY  - 
PB  - John Wiley, Chichester
KW  - Microelectromechanical System Detectors
KW  - Intelligent Control Systems
ER  -