TY  - BOOK
AU  - Setter,Nava
TI  - Electroceramic-Based Mems: fabrication-technology and applications 
SN  - 0387233105
U1  - 621.381 
PY  - 2005///
PB  - Springer-Verlag, New York
KW  - Microelectromechanical Systems
ER  -