TY  - BOOK
AU  - Bao,Minhang
TI  - ANALYSIS AND DESIGN PRINCIPLES OF MEMS DEVICES
SN  - 0 444 51616 6
U1  - 621.381 
PY  - 2005///
CY  - 
PB  - Elsevier,Amsterdam
KW  - Mems
KW  - Microelectromechanical Systems Devices
ER  -